1. Spectroscopic data measurement
   – Visible range: 350~840 nm (or 1.5~3.5 eV)
   – Data acquisition speed: 5 sec for full spectra of {Δ, Ψ}
2. Manually variable angle of incidence
   – 45°~90° with 5° step
3. Single body system
   – 40 cm (W) × 30 cm (D) × 30 cm (H), 15 kg (typical)
   * UV- option requires external lamp power supply
4. Easy operation
   – No set-up / No keys to control
   – Low maintenance
5. User-friendly software
   – operation and analysis
6. Other features
   – Sample stage with tilt & height adjustments
   sample size: (5 mm × 5 mm) ~ (200 mm × 200 mm)
   – Computer with current operating software
7. Options
   – Mapping stage: manual or automatic
   – UV-option: 250~840 nm  (or 1.5~5.0 eV)

1.  Spectroscopic data measurement
   – Visible range: 350~840 nm (or 1.5~3.5 eV)
   – Data acquisition speed: 5 sec for full spectra of {Δ, Ψ}
2. Compact size for mobility
   – 28 cm (W)× 20 cm (D)× 6 cm (H),  6kg
3. Easiest operation in the world
   – No set-up / No keys to control
   – No effort for alignment (sample faces down)
   – Maintenance-free (except lamp )
   – Calibration free (patented)*
4. User-friendly software
   – operation and analysis
5. Other features
   – Fixed angle of incidence: 70° ± 0.5°
   – Sample size: (8 mm × 8 mm) ~ (200 mm × 200 mm)
   – Computer with current operating software

Most ellipsometers require calibration process in each measurement to find the
azimuths of optical elements.
This is a lengthy and complicated process.
SE MF-1000 is calibration free. This makes fast and easy measurement.

1.  Spectroscopic Ellipsometer Head Type
   – Single head type for mapping large-area sample
   – Dimension: 25 cm (W)× 15 cm (D)× 30 cm (H)
   – Fixed Incident angle
   – Wavelength range: 350 ~850 nm
   – Data acquisition speed: 5 sec for full spectra of {Δ, Ψ}
2. Gantry type Stage for Spectroscopic Ellipsometer Head
   – Structure: gantry type (Linear motors): X-Y-Z
   – Operation: step & repeat
   – Max. speed: 0.5 m/s
   – Position accuracy: ±10 mm / full scale
   – Repeatability: ±5 mm / full scale
   – Flatness: 30± mm / full scale
   – Straightness: 15± mm / full scale
   – Pay load: 20 kg at X-slide
3. Easiest operation in the world
   – Vibration Isolation Table
   – Confocal laser scanning microscope
   – Contact angle measurement
   – 4-point probe
   – etc.

1.  Spectroscopic Ellipsometer Head Type
   – Visible range: 350~840 nm (or 1.5~3.5 eV)
   * UV-option: 250~840 nm  (or 1.5~5.0 eV)
   – Data acquisition speed: <5 sec for full spectra of {Δ, Ψ} - Fixed Incident angle
2. Assistance for In Situ System Design
   – Vacuum system
   – Heating cell, chemical cell
   – Mechanical system for interfacing IN Situ System and ellipsometer
3. Option
   – Optical windows for chamber or cell
   – Mechanical shutters for preventing coating on optical windows
   – Computer with current operating software